Handbook of Semiconductor Interconnection Technology
577 pages | Dec 12, 2000 |ISBN:0824799666 | PDF | 7.5 Mb
Covering materials, processes, equipment, methodologies, characterization techniques, clean room practices, and ways to control contamination-related defects, this work offers up-to-date information on the application of interconnection technology to semiconductors. It offers an integration of technical, patent and industry literature.
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